Project leader

Orsay Physics

Partners

Atmel, ST Microelectronics, Biophy Research, CRMCN, CP2M/TECSEN

Funders

FUI,

Ortofib’

Orthogonal Tof FIB


To develop a compact optics integrating efficient FIB and efficient ion analysis by collection then by mass spectrography of the products of spraying.

Project leader

Orsay Physics

Partners

Atmel, ST Microelectronics, Biophy Research, CRMCN, CP2M/TECSEN

Funders

FUI,
Themes Markets R&D Investment Duration Funding Year
Microelectronics
Other
3086 K€ 36 months 2007
Themes
Microelectronics
Markets
Other
R&D Investment
3086 K€
Duration
36 months
Funding Year
2007

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