Project leader
Ion Beam ServicesPartners
R2D Ingénierie, IBS, MGP Instruments, Metraware, LP3, GREMIFunders
FUI,
ALDIP
Laser Activation of Dopants Implanted by Plasma Immersion
Activation without thermal degradation of the substrate
Very high temperature activation for high gap materials
Non-broadcast activation for advanced microelectronics.