Project leader

ENSAM

Partners

ST Microelectronics, EMSE

Funders

ANR,

Sake

Strain-Stress Analysis by Kossel and EBSD Diffraction


The aim of the project is to develop an innovative tool for stress analysis at fine scales of the microstructure, and this in the chamber of a scanning electron microscope (SEM), by coupling two complementary techniques: EBSD and Kossel diffraction.

Project leader

ENSAM

Partners

ST Microelectronics, EMSE

Funders

ANR,
Themes Markets R&D Investment Duration Funding Year
Microelectronics
-- 1182 K€ 36 months 2007
Themes
Microelectronics
Markets
--
R&D Investment
1182 K€
Duration
36 months
Funding Year
2007

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