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ULTINATOOL

ULTImate NAno TOOL

The word “nanotechnology” nowadays is very employed. It relates to the study, the analysis or the creation of objects, natural or artificial, of which dimension is a billion times smaller than our size. The nanometer is the dimension of about ten individual atoms. Scientific instruments had to be created at the same time for the study and the creation of this world of “infinitely the” small one. In particular, processes to make grow solids while controlling, on an atomic scale, the thickness of the layer created, are now industrially used. The MBE (or EJM, which means Epitaxy by Molecular Jets) in is a good example. Other tools were created to engrave or observe reasons, on a nanometric scale, in particular the FIB (Beams of Focused Ions) or SEM (Electron microscope). These processes of growth and engraving proceed in environments very different in particular in terms from vacuum, parasitic fields and vibrations. These differences prevent the coupling in the same machine of these high technologies. In this program, which associates two research laboratories and two French industrialists of high technology, we propose to create an industrial machine, innovating, coupling these processes. This integrated system will make it possible to work out structures under ideal conditions, structures which will constitute the bases of the electronics of tomorrow.

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